abbr. SJ GMU
ISSN 2657-5841 (printed)
ISSN 2657-6988 (online)
DOI: 10.26408
Wyładowanie mikrofalowe (915 MHz) dużej mocy w argonie pod ciśnieniem atmosferycznym
In this paper we present results of spectroscopic study of atmospheric pressure microwave argon plasma at high flow rate. The plasma was generated in resonant cavity type microwave plasma source operated at 915 MHz. The aim of research was determination of electron excitation temperature, plasma temperature and electron number density.
W niniejszym artykule przedstawiono wyniki pomiarów spektroskopowych wyładowania mikrofalowego w argonie pod ciśnieniem atmosferycznym. Badania przeprowadzono dla wyładowania mikrofalowego podtrzymywanego mikrofalami o częstotliwości 915 MHz w mikrofalowym aplikatorze plazmy typu rezonator wnękowy. Na podstawie uzyskanych wyników określono temperaturę wzbudzenia elektronowego, temperaturę cząstek ciężkich plazmy oraz koncentracje elektronów.
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