Spektroskopowe badania wyładowania mikrofalowego w źródle plazmy typu komora rezonansowa zasilana falowodowo

Spectroscopic investigation of discharge in waveguide-supplied resonant-cavity-based microwave plasma source

Bartosz Hrycak         Robert Miotk         Mariusz Jasiński         Mirosław Dors         Marco Scapinello         Jerzy Mizeraczyk    https://orcid.org/0000-0002-5173-3592     


In this paper, results of spectroscopic study of microwave (2.45 GHz) plasma at atmospheric pressure in waveguide-supplied resonant-cavity-based plasma source are presented. Pure argon, nitrogen and methane, as well as mixtures argon/methane and nitrogen/methane were used as working gases. Working gas flow rate and microwave absorbed power varied from 50 up to 100 l/min and from 300 up to 4000 W, respectively. The emission spectra in the range of 300-600 nm were recorded. The rotational and vibrational temperatures of N2+ ions, C2, N2 and CN molecules were determined by comparing the measured and simulated spectra.


W pracy przedstawiono wyniki spektroskopowych badań wyładowania mikrofalowego (2,45 GHz) pod ciśnieniem atmosferycznym, generowanego w źródle plazmy typu komora rezonansowa. Gazami roboczymi były: argon, azot oraz metan, a także mieszaniny argon/metan oraz azot/metan. Natężenie przepływu gazu roboczego zmieniano w zakresie od 50 do 100 l/min, natomiast moc mikrofal absorbowanych przez wyładowanie wynosiła od 300 do 4000 W. Zmierzone zostały widma z zakresu 300–600 nm. Zmierzone widma emisyjne porównywane były z widmami uzyskanymi przy użyciu programów symulacyjnych w celu wyznaczenia temperatur rotacyjnych i oscylacyjnych jonów azotu N2+ oraz molekuł węgla C2, azotu N2 i cyjanu CN.

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Citation pattern: Hrycak B., Miotk R., Jasiński M., Dors M., Scapinello M., Mizeraczyk J., Spektroskopowe badania wyładowania mikrofalowego w źródle plazmy typu komora rezonansowa zasilana falowodowo, Scientific Journal of Gdynia Maritime University, No. 75, pp. 169-180, 2012

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